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[IEEE 2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) - Chengdu, China (2017.10.27-2017.10.30)] 2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) - Simulation study of electrode effect on thin film bulk acoustic resonator for viscosity sensor application
Liu, Hai-qiang, Dai, Jing-hui, Zhang, Jin-hui, Kong, Ling-feng, Qin, Li-fengYear:
2017
Language:
english
DOI:
10.1109/SPAWDA.2017.8340349
File:
PDF, 748 KB
english, 2017