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ChemInform Abstract: THE INCORPORATION OF PHOSPHORUS IN SILICON EPITAXIAL LAYER GROWTH
BLOEM, J., GILING, L. J., GRAEF, M. W. M.Volume:
5
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197451004
Date:
December, 1974
File:
PDF, 134 KB
1974