Characterization of MgO/Al2O3 Composite Film Prepared by DC Magnetron Sputtering and Its Secondary Electron Emission Properties
Wang, Feifei, Zhou, Fan, Wang, Jinshu, Liu, Wei, Zhang, Quan, Yin, QiaoLanguage:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-018-6307-5
Date:
April, 2018
File:
PDF, 1.75 MB
english, 2018