Enhanced mechanical properties of the high-resolution EUVL...

Microelectronic Engineering 2018 / 07 Vol. 194

Enhanced mechanical properties of the high-resolution EUVL patterns of hybrid photoresists containing hexafluoroantimonate

Kumar, Pawan, Reddy, Pulikanti Guruprasad, Sharma, Satinder K., Ghosh, Subrata, Pradeep, Chullikkattil P., Gonsalves, Kenneth E.
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Volume:
194
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.03.014
Date:
July, 2018
File:
PDF, 4.23 MB
english, 2018
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