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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast, United Kingdom (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - An improved sensitivity AlN microcantilever humidity sensor using interdigital transducers actuated very high resonant mode and graphene oxide sensing layer
Le, Xianhao, Ma, Fangyi, Li, Dongsheng, Pang, Jintao, Xu, Zhen, Gao, Chao, Xie, JinYear:
2018
DOI:
10.1109/MEMSYS.2018.8346709
File:
PDF, 923 KB
2018