A New Measuring Method for Spindle Error Motion Using a Cube-corner Prism and Laser Interferometers (1st Report)
OZAWA, Norimitsu, KITAMURA, Yutaka, KOHNO, Tsuguo, MITSUI, Kimiyuki, OKAZAKI, YuichiVolume:
56
Year:
1990
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.56.381
File:
PDF, 2.80 MB
1990