A Metrological Study on Characterization of Microscopic Surface Topography (2nd Report)
KOBAYASHI, Naoki, YANAGI, KazuhisaVolume:
61
Year:
1995
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.61.243
File:
PDF, 1.19 MB
1995