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Principle of Fringe Electric Filed Driven Electrostatic Actuator with Ferroelectric Mover and Comb-shaped Electrodes
TAKAHASHI, Tomokazu, Yamada, Hiroshi, SUZUKI, Masato, AOYAGI, SeijiVolume:
81
Year:
2015
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.81.62
File:
PDF, 1.92 MB
2015