Study of the Ion Sputter-machining (2nd report)

Study of the Ion Sputter-machining (2nd report)

MIYAMOTO, Iwao, TANIGUCHI, Norio
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Volume:
46
Year:
1980
Language:
english
Journal:
Journal of the Japan Society of Precision Engineering
DOI:
10.2493/jjspe1933.46.1021
File:
PDF, 1.44 MB
english, 1980
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