Reliability and characteristics of magnetron sputter...

  • Main
  • 2018 / 4
  • Reliability and characteristics of magnetron sputter...

Reliability and characteristics of magnetron sputter deposited tantalum nitride for thin film resistors

Lee, Dong-Won, Kim, Yong-Nam, Cho, Myung-Yeon, Ko, Pil-Ju, Lee, Daeseok, Koo, Sang-Mo, Moon, Kyoung-Sook, Oh, Jong-Min
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.04.016
Date:
April, 2018
File:
PDF, 2.01 MB
english, 2018
Conversion to is in progress
Conversion to is failed