Effect of por-SiC buffer layer on the parameters of thin...

IOP Conference Series Materials Science and Engineering 2015 / 04 Vol. 81

Effect of por-SiC buffer layer on the parameters of thin Er 2 O3 layers on silicon carbide substrates

Bacherikov, Yu Yu, Konakova, R V, Okhrimenko, O B, Berezovska, N I, Kapitanchuk, L M, Svetlichnyi, A M, Svetlichnaya, L A
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Volume:
81
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/81/1/012019
Date:
April, 2015
File:
PDF, 1.02 MB
english, 2015
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