Processing of brittle materials in the nanometer range of thickness of layers cut
Shavva, M A, Lapshin, V V, Grubyy, S VVolume:
91
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/91/1/012062
Date:
September, 2015
File:
PDF, 1.36 MB
english, 2015