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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast, United Kingdom (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields
Krakover, Naftaly, Hic, B. Robert, Krylov, SlavaYear:
2018
DOI:
10.1109/MEMSYS.2018.8346688
File:
PDF, 702 KB
2018