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Deposition of hard carbon films by R.F. glow discharge method.
Kobayashi, Kenji, Mutsukura, Nobuki, Yamamoto, Kiyoyuki, Machi, YoshioVolume:
34
Year:
1987
Journal:
Journal of the Japan Society of Powder and Powder Metallurgy
DOI:
10.2497/jjspm.34.402
File:
PDF, 2.53 MB
1987