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Orientation, morphology and properties of TiN films deposited by reactive ion plating.
WANG, Dongdong, MURATA, Hideaki, OKI, TakeoVolume:
41
Year:
1990
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.41.382
File:
PDF, 1.66 MB
1990