Ultrasonic Effects on the Properties of Copper Deposited...

Journal of The Surface Finishing Society of Japan 1993 Vol. 44; Iss. 7

Ultrasonic Effects on the Properties of Copper Deposited Film.

CHIBA, Atsushi, WU, Wen-Chang, NAKANISHI, Kazumi
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Volume:
44
Year:
1993
Language:
english
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.44.631
File:
PDF, 1.77 MB
english, 1993
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