Fabrication of Metal Micro-structure with Anodizing of...

Journal of The Surface Finishing Society of Japan 1999 Vol. 50; Iss. 8

Fabrication of Metal Micro-structure with Anodizing of Aluminum and Laser Irradiation. For Development of Novel LIGA Process.

KIKUCHI, Tatsuya, CHU, Song Zhu, KATO, Zenta, SAKAIRI, Masatoshi, TAKAHASHI, Hideaki
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Volume:
50
Year:
1999
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.50.697
File:
PDF, 5.26 MB
1999
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