Multiscale three-dimensional CFD modeling for PECVD of...

Computers & Chemical Engineering 2018 / 05 Vol. 113

Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films

Crose, Marquis, Zhang, Weiqi, Tran, Anh, Christofides, Panagiotis D.
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Volume:
113
Language:
english
Journal:
Computers & Chemical Engineering
DOI:
10.1016/j.compchemeng.2018.03.011
Date:
May, 2018
File:
PDF, 3.10 MB
english, 2018
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