Rapid Fabrication of 100 nm or Thinner Fully Depleted Silicon-on-Insulator Materials for Ultralow Energy Consumption
Lee, Benjamin T.-H., Huang, Ching-Han, Ho, Chia-Che, Lo, Fa-SainLanguage:
english
Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.8b00602
Date:
April, 2018
File:
PDF, 5.98 MB
english, 2018