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Microstructural study of He+-implanted and thermally annealed silicon-on-sapphire layers
Chesnokova, Yu. M., Aleksandrova, P. A., Belova, N. E., Shemardov, S. G., Vasiliev, A. L.Volume:
62
Language:
english
Journal:
Crystallography Reports
DOI:
10.1134/S1063774517040058
Date:
July, 2017
File:
PDF, 634 KB
english, 2017