Thin films-preparation, structure and properties. Film formation and structure control by ionized cluster beam.
USUI, Hiroaki, TAKAOKA, Hiroshi, YAMADA, Isao, TAKAGI, ToshinoriYear:
1987
Journal:
NIPPON KAGAKU KAISHI
DOI:
10.1246/nikkashi.1987.1908
File:
PDF, 9.29 MB
1987