Synthesis of AlN Thin Films by Dual Ion Beam Sputtering...

Journal of the Japan Society of Powder and Powder Metallurgy 1992 Vol. 39; Iss. 2

Synthesis of AlN Thin Films by Dual Ion Beam Sputtering Method.

Kamijo, Eiji, Suzuki, Takao, Koizumi, Mitsue
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Volume:
39
Year:
1992
Journal:
Journal of the Japan Society of Powder and Powder Metallurgy
DOI:
10.2497/jjspm.39.119
File:
PDF, 178 KB
1992
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