Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma
YAMAMOTO, Tetsuya, NOMOTO, Junichi, KITAMI, Hisashi, SAKEMI, Toshiyuki, MAKINO, Hisao, KOBAYASHI, Keisuke, AOKI, Yasushi, KISHIMOTO, SeiichiVolume:
60
Year:
2017
Journal:
Journal of the Vacuum Society of Japan
DOI:
10.3131/jvsj2.60.292
File:
PDF, 944 KB
2017