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Structure and Wear of TiN Films Formed by Dynamic Mixing Process.
NAKASHIMA, Shoichi, CHIGASAKI, MitsuoVolume:
42
Year:
1991
Language:
english
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.42.923
File:
PDF, 1.16 MB
english, 1991