Effects of Substrate on Orientation of TiN Films Prepared by Ion Plating.
MATSUTAKE, Hiroyasu, BABA, Komei, HASAKA, MasayukiVolume:
43
Year:
1992
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.43.579
File:
PDF, 603 KB
1992