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Influence of the oxygen consumption on the crystalline structure of titanium oxides thin films prepared by DC reactive magnetron sputtering
Villarroel, Roberto, Espinoza-González, Rodrigo, Lisoni, Judit, González-Moraga, GuillermoVolume:
154
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.04.049
Date:
August, 2018
File:
PDF, 6.88 MB
english, 2018