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Healing Surface Roughness of Lithographic Nanopatterns through Sub-10 nm Aqueous-dispersible Polymeric Particles with Excellent Dry Etch Durability
Jiang, Zhen, Cheng, Hanhao, Blakey, Idriss, Whittaker, AndrewYear:
2018
Language:
english
Journal:
Molecular Systems Design & Engineering
DOI:
10.1039/c8me00007g
File:
PDF, 1.42 MB
english, 2018