AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Junction leakage measurements with micro four-point probes
Lin, Rong, Petersen, Dirch H., Wang, Fei, Yates, Bradley R., Jones, Kevin S., Hansen, Ole, Kontos, Alex, Nielsen, Peter F.Year:
2012
Language:
english
DOI:
10.1063/1.4766518
File:
PDF, 287 KB
english, 2012