Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam
Korobeishchikov, N G, Nikolaev, I V, Roenko, M AVolume:
927
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/927/1/012026
Date:
November, 2017
File:
PDF, 711 KB
english, 2017