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Recent progress on non-thermal plasma technology for high barrier layer fabrication
ZHANG, Haibao, SANG, Lijun, WANG, Zhengduo, LIU, Zhongwei, YANG, Lizhen, CHEN, QiangVolume:
20
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aaacc8
Date:
February, 2018
File:
PDF, 1.90 MB
english, 2018