Nano-Structure-Controlled Very Low Resistivity Cu Wires...

IEEE Journal of the Electron Devices Society 2018 Vol. 6

Nano-Structure-Controlled Very Low Resistivity Cu Wires Formed by High Purity and Optimized Additives

Onuki, Jin, Tamahashi, Kunihiro, Inami, Takashi, Nagano, Takatoshi, Sasajima, Yasushi, Ikeda, Shuji
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Volume:
6
Year:
2018
Language:
english
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/jeds.2018.2808494
File:
PDF, 3.19 MB
english, 2018
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