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Smoothing of Single Crystalline SiC, GaN and ZnO by Catalyst Referred Etching
YAMAUCHI, Kazuto, SANO, Yasuhisa, ARIMA, KentaVolume:
33
Year:
2012
Journal:
Hyomen Kagaku
DOI:
10.1380/jsssj.33.334
File:
PDF, 665 KB
2012