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Numerical Simulation of Atomic Layer Oxidation of Silicon by Oxygen Gas Cluster Beams
MIZOTANI, Kohei, ISOBE, Michiro, KARAHASHI, Kazuhiro, HAMAGUCHI, SatoshiVolume:
10
Year:
2015
Language:
english
Journal:
Plasma and Fusion Research
DOI:
10.1585/pfr.10.1406079
File:
PDF, 1.15 MB
english, 2015