Synthesis of SiC layer on metal silicon from SiO by a chemical vapor deposition process
MURAKAWA, Norihiro, IIZUKA, Tomonori, EGUCHI, Masanori, TATSUMI, KoheiVolume:
125
Year:
2017
Language:
english
Journal:
Journal of the Ceramic Society of Japan
DOI:
10.2109/jcersj2.17040
File:
PDF, 2.18 MB
english, 2017