Fabrication of Pt-O Thin Film Electrode for an HF-gas...

Fabrication of Pt-O Thin Film Electrode for an HF-gas Sensor.

NAKANO, Nobuo, ISHIJI, Toru, OKAMOTO, Akio, SUZUKI, Yoshihiko, OGAWA, Soichi
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Volume:
43
Year:
1992
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.43.785
File:
PDF, 528 KB
1992
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