Fabrication of Pt-O Thin Film Electrode for an HF-gas Sensor.
NAKANO, Nobuo, ISHIJI, Toru, OKAMOTO, Akio, SUZUKI, Yoshihiko, OGAWA, SoichiVolume:
43
Year:
1992
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.43.785
File:
PDF, 528 KB
1992