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Development of research-scale ion mixing and it's use in preparation of TiN films by N2 gas assisted ion beam mixing.
SUMIYA, Tooru, KUNIBE, Toshiju, TAGOMORI, Kunihiko, CHIDA, Nakaya, MATSUURA, Masamichi, SAKURADA, YuzoVolume:
39
Year:
1988
Journal:
Journal of the Metal Finishing Society of Japan
DOI:
10.4139/sfj1950.39.623
File:
PDF, 1.01 MB
1988