Scanning microwave microscopy of buried CMOS interconnect...

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International Journal of Microwave and Wireless Technologies 2018 / 4

Scanning microwave microscopy of buried CMOS interconnect lines with nanometer resolution

Jin, Xin, Xiong, Kuanchen, Marstell, Roderick, Strandwitz, Nicholas C., Hwang, James C. M., Farina, Marco, Göritz, Alexander, Wietstruck, Matthias, Kaynak, Mehmet
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Language:
english
Journal:
International Journal of Microwave and Wireless Technologies
DOI:
10.1017/S1759078718000181
Date:
April, 2018
File:
PDF, 592 KB
english, 2018
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