Optimization Problem of Thermal Field on Surface of...

IOP Conference Series Earth and Environmental Science 2017 / 10 Vol. 87

Optimization Problem of Thermal Field on Surface of Revolving Susceptor in Vapor-Phase Epitaxy Reactor

Zhilenkov, A A, Chernyi, S G, Nyrkov, A P, Sokolov, S S
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Volume:
87
Language:
english
Journal:
IOP Conference Series: Earth and Environmental Science
DOI:
10.1088/1755-1315/87/8/082060
Date:
October, 2017
File:
PDF, 211 KB
english, 2017
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