Process of Formation of Vacuum Polymer Films in the HF...

IOP Conference Series Materials Science and Engineering 2017 / 04 Vol. 189

Process of Formation of Vacuum Polymer Films in the HF Discharge Reactor

Luchnikov, P A, Surzhikova, O A
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Volume:
189
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/189/1/012014
Date:
April, 2017
File:
PDF, 831 KB
english, 2017
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