Dimensional measurement of micro mechanical components with...

Microsystem Technologies 1996 / 02 Vol. 2; Iss. 2

Dimensional measurement of micro mechanical components with HAR

U. Breitmeier, G. Häusler
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Volume:
2
Language:
english
Pages:
4
DOI:
10.1007/bf02447754
Date:
February, 1996
File:
PDF, 851 KB
english, 1996
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