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Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process
S. Roy, S. Furukawa, M. MehreganyVolume:
2
Language:
english
Pages:
5
DOI:
10.1007/bf02447757
Date:
February, 1996
File:
PDF, 1.36 MB
english, 1996