[IEEE 2017 16th International Superconductive Electronics Conference (ISEC) - Naples (2017.6.12-2017.6.16)] 2017 16th International Superconductive Electronics Conference (ISEC) - Developments toward a 250-nm, Fully Planarized Fabrication Process with Ten Superconducting Layers and Self-Shunted Josephson Junctions

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