[IEEE 2017 Progress In Electromagnetics Research Symposium - Spring (PIERS) - St Petersburg, Russia (2017.5.22-2017.5.25)] 2017 Progress In Electromagnetics Research Symposium - Spring (PIERS) - Atomic-force lithography for photonic applications
Kucherik, A., Kutrovskaya, S., Skryabin, I., Shagurina, A., Osipov, A., Chesnov, I.Year:
2017
Language:
english
DOI:
10.1109/PIERS.2017.8261890
File:
PDF, 198 KB
english, 2017