Investigation of top gate GaN thin-film transistor...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 05 Vol. 36; Iss. 3

Investigation of top gate GaN thin-film transistor fabricated by DC magnetron sputtering

Chen, Rongsheng, Deng, Sunbin, Liu, Yuan, Liu, Yurong, Li, Bin, Wong, Man, Kwok, Hoi-Sing
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.5021705
Date:
May, 2018
File:
PDF, 792 KB
english, 2018
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