[WORLD SCIENTIFIC Proceedings of the 5th Italian Conference — Extended to Mediterranean Countries - Lecce, Italy (12 – 16 February 2000)] Sensors and Microsystems - ADVANCES IN DEEP OXIDE ETCH PROCESSING FOR MEMS – MASK SELECTION
BHARDWAJ, J. K., WELCH, C., BARKER, A., GUNN, R., LEA, L., WATCHAM, S.Language:
english
DOI:
10.1142/9789812792013_0053
File:
PDF, 879 KB
english