Design and Testing of a Micro-thermal Sensor Probe for...

Nanomanufacturing and Metrology 2018 / 3 Vol. 1; Iss. 1

Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface

Shimizu, Yuki, Matsuno, Yuki, Chen, Yuan-Liu, Matsukuma, Hiraku, Gao, Wei
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Volume:
1
Language:
english
Journal:
Nanomanufacturing and Metrology
DOI:
10.1007/s41871-018-0007-x
Date:
March, 2018
File:
PDF, 3.58 MB
english, 2018
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