Etch tapered angle on the influence of GaN membrane grating reflectance spectra
Tu, Zhenzhen, Lv, Lanlan, Song, Ruxiang, Su, Xiaodan, Wang, WeigangVolume:
165
Language:
english
Journal:
Optik
DOI:
10.1016/j.ijleo.2018.03.126
Date:
July, 2018
File:
PDF, 1.99 MB
english, 2018