Temperature-dependence improvement for a MEMS gyroscope...

Micro & Nano Letters 2017 / 11 Vol. 12; Iss. 11

Temperature-dependence improvement for a MEMS gyroscope using triangular-electrode based capacitive detection method

Lin, Yiyu, Zheng, Xudong, Liu, Siqi, Ma, Wei, Jin, Zhonghe
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Volume:
12
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2017.0431
Date:
November, 2017
File:
PDF, 577 KB
english, 2017
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