High level active n + doping of strained germanium through co-implantation and nanosecond pulsed laser melting
Pastor, David, Gandhi, Hemi H., Monmeyran, Corentin P., Akey, Austin J., Milazzo, Ruggero, Cai, Yan, Napolitani, Enrico, Gwilliam, Russell M., Crowe, Iain F., Michel, Jurgen, Kimerling, L. C., AgarwalVolume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5012512
Date:
April, 2018
File:
PDF, 750 KB
english, 2018