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High responsivity secondary ion energy analyzer
Belov, A.S., Chermoshentsev, D.A., Gavrilov, S.A., Frolov, O.T., Netchaeva, L.P., Nikulin, E.S., Zubets, V.N.Volume:
13
Language:
english
Journal:
Journal of Instrumentation
DOI:
10.1088/1748-0221/13/05/T05001
Date:
May, 2018
File:
PDF, 2.14 MB
english, 2018