High responsivity secondary ion energy analyzer

Belov, A.S., Chermoshentsev, D.A., Gavrilov, S.A., Frolov, O.T., Netchaeva, L.P., Nikulin, E.S., Zubets, V.N.

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Volume:

Language:

english

Journal:

Journal of Instrumentation

DOI:

10.1088/1748-0221/13/05/T05001

Date:

May, 2018

File:

PDF, 2.14 MB

english, 2018

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